Scimago Journal & Country Rank

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Country

United States

Universities and research institutions in United States
Media Ranking in United States

Subject Area and Category

Publisher

SPIE

H-Index

45

Publication type

Journals

ISSN

19325134, 19325150

Coverage

2007-2023

Information

Homepage

How to publish in this journal

jm3@spie.org

Scope

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry. Key subject areas include the science, development, and practice of lithographic, computational, etch, and integration technologies. In this context the electronics industry includes but is not limited to integrated circuits and multichip modules, and advanced packaging with features in the submicron regime. Join the conversation about this journal
Quartiles

The set of journals have been ranked according to their SJR and divided into four equal groups, four quartiles. Q1 (green) comprises the quarter of the journals with the highest values, Q2 (yellow) the second highest values, Q3 (orange) the third highest values and Q4 (red) the lowest values.

CategoryYearQuartile
Atomic and Molecular Physics, and Optics2003Q2
Atomic and Molecular Physics, and Optics2004Q2
Atomic and Molecular Physics, and Optics2005Q2
Atomic and Molecular Physics, and Optics2006Q2
Atomic and Molecular Physics, and Optics2007Q2
Atomic and Molecular Physics, and Optics2008Q2
Atomic and Molecular Physics, and Optics2009Q3
Atomic and Molecular Physics, and Optics2010Q3
Atomic and Molecular Physics, and Optics2011Q3
Atomic and Molecular Physics, and Optics2012Q3
Atomic and Molecular Physics, and Optics2013Q3
Atomic and Molecular Physics, and Optics2014Q3
Atomic and Molecular Physics, and Optics2015Q3
Atomic and Molecular Physics, and Optics2016Q3
Atomic and Molecular Physics, and Optics2017Q3
Atomic and Molecular Physics, and Optics2018Q3
Atomic and Molecular Physics, and Optics2019Q3
Atomic and Molecular Physics, and Optics2020Q3
Atomic and Molecular Physics, and Optics2021Q3
Atomic and Molecular Physics, and Optics2022Q3
Atomic and Molecular Physics, and Optics2023Q3
Condensed Matter Physics2003Q2
Condensed Matter Physics2004Q2
Condensed Matter Physics2005Q2
Condensed Matter Physics2006Q3
Condensed Matter Physics2007Q3
Condensed Matter Physics2008Q2
Condensed Matter Physics2009Q3
Condensed Matter Physics2010Q3
Condensed Matter Physics2011Q3
Condensed Matter Physics2012Q3
Condensed Matter Physics2013Q3
Condensed Matter Physics2014Q3
Condensed Matter Physics2015Q3
Condensed Matter Physics2016Q3
Condensed Matter Physics2017Q3
Condensed Matter Physics2018Q3
Condensed Matter Physics2019Q3
Condensed Matter Physics2020Q3
Condensed Matter Physics2021Q3
Condensed Matter Physics2022Q3
Condensed Matter Physics2023Q3
Electrical and Electronic Engineering2003Q2
Electrical and Electronic Engineering2004Q1
Electrical and Electronic Engineering2005Q2
Electrical and Electronic Engineering2006Q2
Electrical and Electronic Engineering2007Q2
Electrical and Electronic Engineering2008Q2
Electrical and Electronic Engineering2009Q2
Electrical and Electronic Engineering2010Q2
Electrical and Electronic Engineering2011Q2
Electrical and Electronic Engineering2012Q2
Electrical and Electronic Engineering2013Q2
Electrical and Electronic Engineering2014Q2
Electrical and Electronic Engineering2015Q2
Electrical and Electronic Engineering2016Q2
Electrical and Electronic Engineering2017Q2
Electrical and Electronic Engineering2018Q2
Electrical and Electronic Engineering2019Q2
Electrical and Electronic Engineering2020Q2
Electrical and Electronic Engineering2021Q3
Electrical and Electronic Engineering2022Q3
Electrical and Electronic Engineering2023Q3
Electronic, Optical and Magnetic Materials2003Q2
Electronic, Optical and Magnetic Materials2004Q2
Electronic, Optical and Magnetic Materials2005Q2
Electronic, Optical and Magnetic Materials2006Q2
Electronic, Optical and Magnetic Materials2007Q3
Electronic, Optical and Magnetic Materials2008Q3
Electronic, Optical and Magnetic Materials2009Q3
Electronic, Optical and Magnetic Materials2010Q3
Electronic, Optical and Magnetic Materials2011Q3
Electronic, Optical and Magnetic Materials2012Q3
Electronic, Optical and Magnetic Materials2013Q3
Electronic, Optical and Magnetic Materials2014Q3
Electronic, Optical and Magnetic Materials2015Q3
Electronic, Optical and Magnetic Materials2016Q3
Electronic, Optical and Magnetic Materials2017Q3
Electronic, Optical and Magnetic Materials2018Q3
Electronic, Optical and Magnetic Materials2019Q3
Electronic, Optical and Magnetic Materials2020Q3
Electronic, Optical and Magnetic Materials2021Q3
Electronic, Optical and Magnetic Materials2022Q3
Electronic, Optical and Magnetic Materials2023Q3
Mechanical Engineering2003Q2
Mechanical Engineering2004Q1
Mechanical Engineering2005Q1
Mechanical Engineering2006Q2
Mechanical Engineering2007Q2
Mechanical Engineering2008Q2
Mechanical Engineering2009Q2
Mechanical Engineering2010Q2
Mechanical Engineering2011Q2
Mechanical Engineering2012Q2
Mechanical Engineering2013Q2
Mechanical Engineering2014Q2
Mechanical Engineering2015Q2
Mechanical Engineering2016Q2
Mechanical Engineering2017Q2
Mechanical Engineering2018Q2
Mechanical Engineering2019Q2
Mechanical Engineering2020Q2
Mechanical Engineering2021Q3
Mechanical Engineering2022Q3
Mechanical Engineering2023Q2
Nanoscience and Nanotechnology2003Q3
Nanoscience and Nanotechnology2004Q3
Nanoscience and Nanotechnology2005Q3
Nanoscience and Nanotechnology2006Q3
Nanoscience and Nanotechnology2007Q3
Nanoscience and Nanotechnology2008Q3
Nanoscience and Nanotechnology2009Q4
Nanoscience and Nanotechnology2010Q3
Nanoscience and Nanotechnology2011Q3
Nanoscience and Nanotechnology2012Q3
Nanoscience and Nanotechnology2013Q3
Nanoscience and Nanotechnology2014Q3
Nanoscience and Nanotechnology2015Q3
Nanoscience and Nanotechnology2016Q3
Nanoscience and Nanotechnology2017Q3
Nanoscience and Nanotechnology2018Q3
Nanoscience and Nanotechnology2019Q3
Nanoscience and Nanotechnology2020Q3
Nanoscience and Nanotechnology2021Q3
Nanoscience and Nanotechnology2022Q3
Nanoscience and Nanotechnology2023Q3
SJR

The SJR is a size-independent prestige indicator that ranks journals by their 'average prestige per article'. It is based on the idea that 'all citations are not created equal'. SJR is a measure of scientific influence of journals that accounts for both the number of citations received by a journal and the importance or prestige of the journals where such citations come from It measures the scientific influence of the average article in a journal, it expresses how central to the global scientific discussion an average article of the journal is.

YearSJR
20030.576
20040.764
20050.580
20060.514
20070.484
20080.523
20090.292
20100.435
20110.376
20120.455
20130.410
20140.394
20150.426
20160.372
20170.379
20180.336
20190.389
20200.394
20210.368
20220.298
20230.393
Total Documents

Evolution of the number of published documents. All types of documents are considered, including citable and non citable documents.

YearDocuments
200234
200341
200472
200587
200666
200765
200877
2009135
201098
201190
201233
201388
2014120
2015119
2016129
201773
201873
201966
202030
202166
202270
202365
Citations per document

This indicator counts the number of citations received by documents from a journal and divides them by the total number of documents published in that journal. The chart shows the evolution of the average number of times documents published in a journal in the past two, three and four years have been cited in the current year. The two years line is equivalent to journal impact factor ™ (Thomson Reuters) metric.

Cites per documentYearValue
Cites / Doc. (4 years)20020.000
Cites / Doc. (4 years)20031.147
Cites / Doc. (4 years)20041.920
Cites / Doc. (4 years)20051.646
Cites / Doc. (4 years)20061.466
Cites / Doc. (4 years)20071.113
Cites / Doc. (4 years)20081.100
Cites / Doc. (4 years)20091.081
Cites / Doc. (4 years)20101.280
Cites / Doc. (4 years)20111.208
Cites / Doc. (4 years)20121.123
Cites / Doc. (4 years)20131.132
Cites / Doc. (4 years)20141.217
Cites / Doc. (4 years)20151.399
Cites / Doc. (4 years)20161.458
Cites / Doc. (4 years)20171.298
Cites / Doc. (4 years)20181.168
Cites / Doc. (4 years)20191.234
Cites / Doc. (4 years)20201.205
Cites / Doc. (4 years)20211.521
Cites / Doc. (4 years)20221.562
Cites / Doc. (4 years)20231.784
Cites / Doc. (3 years)20020.000
Cites / Doc. (3 years)20031.147
Cites / Doc. (3 years)20041.920
Cites / Doc. (3 years)20051.646
Cites / Doc. (3 years)20061.395
Cites / Doc. (3 years)20071.133
Cites / Doc. (3 years)20081.170
Cites / Doc. (3 years)20091.091
Cites / Doc. (3 years)20101.289
Cites / Doc. (3 years)20111.190
Cites / Doc. (3 years)20121.170
Cites / Doc. (3 years)20131.145
Cites / Doc. (3 years)20141.374
Cites / Doc. (3 years)20151.539
Cites / Doc. (3 years)20161.440
Cites / Doc. (3 years)20171.315
Cites / Doc. (3 years)20181.283
Cites / Doc. (3 years)20191.371
Cites / Doc. (3 years)20201.387
Cites / Doc. (3 years)20211.550
Cites / Doc. (3 years)20221.599
Cites / Doc. (3 years)20231.861
Cites / Doc. (2 years)20020.000
Cites / Doc. (2 years)20031.147
Cites / Doc. (2 years)20041.920
Cites / Doc. (2 years)20051.540
Cites / Doc. (2 years)20061.365
Cites / Doc. (2 years)20071.007
Cites / Doc. (2 years)20081.145
Cites / Doc. (2 years)20091.000
Cites / Doc. (2 years)20101.245
Cites / Doc. (2 years)20111.167
Cites / Doc. (2 years)20121.218
Cites / Doc. (2 years)20131.333
Cites / Doc. (2 years)20141.496
Cites / Doc. (2 years)20151.563
Cites / Doc. (2 years)20161.452
Cites / Doc. (2 years)20171.419
Cites / Doc. (2 years)20181.257
Cites / Doc. (2 years)20191.651
Cites / Doc. (2 years)20201.388
Cites / Doc. (2 years)20211.479
Cites / Doc. (2 years)20221.896
Cites / Doc. (2 years)20231.779
Total Cites 
Self-Cites

Evolution of the total number of citations and journal's self-citations received by a journal's published documents during the three previous years.
Journal Self-citation is defined as the number of citation from a journal citing article to articles published by the same journal.

CitesYearValue
Self Cites20020
Self Cites20031
Self Cites200414
Self Cites200520
Self Cites200610
Self Cites20076
Self Cites200819
Self Cites200924
Self Cites201040
Self Cites201128
Self Cites201220
Self Cites201326
Self Cites201441
Self Cites201545
Self Cites201661
Self Cites201754
Self Cites201845
Self Cites201960
Self Cites202030
Self Cites202145
Self Cites202261
Self Cites202335
Total Cites20020
Total Cites200339
Total Cites2004144
Total Cites2005242
Total Cites2006279
Total Cites2007255
Total Cites2008255
Total Cites2009227
Total Cites2010357
Total Cites2011369
Total Cites2012378
Total Cites2013253
Total Cites2014290
Total Cites2015371
Total Cites2016471
Total Cites2017484
Total Cites2018412
Total Cites2019377
Total Cites2020294
Total Cites2021262
Total Cites2022259
Total Cites2023309
External Cites per Doc 
Cites per Doc

Evolution of the number of total citation per document and external citation per document (i.e. journal self-citations removed) received by a journal's published documents during the three previous years. External citations are calculated by subtracting the number of self-citations from the total number of citations received by the journal’s documents.

CitesYearValue
External Cites per document20020
External Cites per document20031.118
External Cites per document20041.733
External Cites per document20051.510
External Cites per document20061.345
External Cites per document20071.107
External Cites per document20081.083
External Cites per document20090.976
External Cites per document20101.144
External Cites per document20111.100
External Cites per document20121.108
External Cites per document20131.027
External Cites per document20141.180
External Cites per document20151.353
External Cites per document20161.254
External Cites per document20171.168
External Cites per document20181.143
External Cites per document20191.153
External Cites per document20201.245
External Cites per document20211.284
External Cites per document20221.222
External Cites per document20231.651
Cites per document20020.000
Cites per document20031.147
Cites per document20041.920
Cites per document20051.646
Cites per document20061.395
Cites per document20071.133
Cites per document20081.170
Cites per document20091.091
Cites per document20101.289
Cites per document20111.190
Cites per document20121.170
Cites per document20131.145
Cites per document20141.374
Cites per document20151.539
Cites per document20161.440
Cites per document20171.315
Cites per document20181.283
Cites per document20191.371
Cites per document20201.387
Cites per document20211.550
Cites per document20221.599
Cites per document20231.861
% International Collaboration

International Collaboration accounts for the articles that have been produced by researchers from several countries. The chart shows the ratio of a journal's documents signed by researchers from more than one country; that is including more than one country address.

YearInternational Collaboration
200223.53
200319.51
200415.28
200525.29
200624.24
200721.54
200811.69
200925.19
201016.33
201126.67
201221.21
201312.50
201425.83
201526.05
201624.81
201717.81
201824.66
201924.24
202016.67
202122.73
202228.57
202324.62
Citable documents 
Non-citable documents

Not every article in a journal is considered primary research and therefore "citable", this chart shows the ratio of a journal's articles including substantial research (research articles, conference papers and reviews) in three year windows vs. those documents other than research articles, reviews and conference papers.

DocumentsYearValue
Non-citable documents20020
Non-citable documents20030
Non-citable documents20040
Non-citable documents20055
Non-citable documents200612
Non-citable documents200718
Non-citable documents200817
Non-citable documents200915
Non-citable documents201018
Non-citable documents201121
Non-citable documents201221
Non-citable documents201315
Non-citable documents201411
Non-citable documents201512
Non-citable documents201613
Non-citable documents201718
Non-citable documents201816
Non-citable documents201917
Non-citable documents202012
Non-citable documents202112
Non-citable documents202217
Non-citable documents202324
Citable documents20020
Citable documents200334
Citable documents200475
Citable documents2005142
Citable documents2006188
Citable documents2007207
Citable documents2008201
Citable documents2009193
Citable documents2010259
Citable documents2011289
Citable documents2012302
Citable documents2013206
Citable documents2014200
Citable documents2015229
Citable documents2016314
Citable documents2017350
Citable documents2018305
Citable documents2019258
Citable documents2020200
Citable documents2021157
Citable documents2022145
Citable documents2023142
Cited documents 
Uncited documents

Ratio of a journal's items, grouped in three years windows, that have been cited at least once vs. those not cited during the following year.

DocumentsYearValue
Uncited documents20020
Uncited documents200318
Uncited documents200430
Uncited documents200574
Uncited documents2006101
Uncited documents2007113
Uncited documents2008109
Uncited documents2009111
Uncited documents2010126
Uncited documents2011165
Uncited documents2012159
Uncited documents2013114
Uncited documents201491
Uncited documents201596
Uncited documents2016136
Uncited documents2017159
Uncited documents2018138
Uncited documents2019129
Uncited documents202094
Uncited documents202179
Uncited documents202264
Uncited documents202368
Cited documents20020
Cited documents200316
Cited documents200445
Cited documents200573
Cited documents200699
Cited documents2007112
Cited documents2008109
Cited documents200997
Cited documents2010151
Cited documents2011145
Cited documents2012164
Cited documents2013107
Cited documents2014120
Cited documents2015145
Cited documents2016191
Cited documents2017209
Cited documents2018183
Cited documents2019146
Cited documents2020118
Cited documents202190
Cited documents202298
Cited documents202398
Scimago Journal & Country Rank
Show this widget in your own website

Just copy the code below and paste within your html code:
SCImago Graphica
Explore, visually communicate and make sense of data with our new data visualization tool.
Metrics based on Scopus® data as of March 2024
Loading comments…

Leave a comment

* Required

* Required

* Required

* Required

The users of Scimago Journal & Country Rank have the possibility to dialogue through comments linked to a specific journal. The purpose is to have a forum in which general doubts about the processes of publication in the journal, experiences and other issues derived from the publication of papers are resolved. For topics on particular articles, maintain the dialogue through the usual channels with your editor.

Developed by:
Scimago Lab
Powered by:
Powered by scopus

Follow us on @ScimagoJR

Scimago Lab, Copyright 2007-2024. Data Source: Scopus®

Legal Notice

Privacy Policy